1999 Book on Silicon VLSI Technology

20+ years ago we authored a textbook (with Mike Deal) on silicon VLSI technology. The book was published by Pearson Education and is now out of print. This book was widely used but obviously silicon technology has changed since it was written. A few years ago we began an effort to update this book but soon realized that so much had changed that an entirely new book was appropriate, thus Integrated Circuit Fabrication: Science and Technology was written.

Prentice Hall (Pearson Education) has kindly returned the copyright on the earlier book to the original authors. For those who still find this book useful, we are pleased to make available a pdf version of the book. This version is free to view and download for personal use only. Not for redistribution, resale or use in derivative works. © Plummer, Deal & Griffin 1999.